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Jing Wen Zhang
兰州理工大学, 讲师
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变结构反应离子刻蚀腔室流场热场的数值仿真
张景文
; 范斌
*
; 李志炜; 汉语
激光技术
, 2020, 44(1): 136-142.
DOI:
10. 7510 /jgjs. issn. 1001-3806.
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