High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering

作者：Lin Jianliang; Sproul William D^*; Moore John J; Lee Sabrina; Myers Sterling

来源：Surface and Coatings Technology, 2011, 205(10): 3226-3234.

DOI：10.1016/j.surfcoat.2010.11.039

• Modulated pulse power (MPP)
• High power pulsed magnetron sputtering (HPPMS)
• High power impulse magnetron sputtering (HIPIMS)
• Thick coating
• CrN coating
• Cr2N coating
• Wear

As a variation of high power pulsed magnetron sputtering technique, modulated pulse power (MPP) magnetron sputtering can achieve a high deposition rate while at the same time achieving a high degree of ionization of the sputtered material with low ion energies. These advantages of the MPP technique can be utilized to obtain dense coatings with a small incorporation of the residual stress and defect density for the thick coating growth. In this study, the MPP technique has been utilized to reactively deposit thick Cr2N and CrN coatings (up to 55 mu m) on AISI 440C steel and cemented carbide substrates in a closed field unbalanced magnetron sputtering system. High deposition rates of 15 and 10 mu m per hour have been measured for the Cr2N and CrN coating depositions, respectively, using a 3 kW average target power (16.7 W/cm(2) average target power density), a 50 mm substrate to target distance and an Ar/N-2 gas flow ratio of 3:1 and 1:1. The CrN coatings showed a denser microstructure than the Cr2N coatings, whereas the Cr2N coatings exhibited a smaller grain size and surface roughness than those of the CrN coatings for the same coating thickness. The compressive residual stresses in the CrN and Cr2N coatings increased as the coating thickness increased to 30 mu m and 20 mu m, respectively, but for thicker coatings, the stress gradually decreased as the coating thickness increased. The CrN coatings exhibited an increase in the scratch test critical load as the thickness was increased. Both CrN and Cr2N coatings showed a decrease in the hardness and an increase in the sliding coefficient of friction as the coating thickness increased from 2.5 to 55 mu m. However, the wear rate of the CrN coatings decreased significantly as the coating thickness was increased to 10 mu m or higher. The 10-55 mu m CrN coating exhibited low wear rates in the range of 3.5-5 x 10(-7) mm(3) N-1 m(-1). To the contrary, the Cr2N coating exhibited relatively low wear resistance in that high wear rates in the range of 3.5 to 7.5 x 10(-6) mm(3) N-1 m(-1) observed for different thicknesses. Published by Elsevier B.V.

• 出版日期2011-2-15