Angular distributions of atoms sputtered from NiAl{110} and Ni{100}

作者：Tan Ming^*

来源：Applied Surface Science, 2007, 253(22): 8905-8910.

DOI：10.1016/j.apsusc.2007.05.004

• angular distribution
• sputtered atoms
• alloy
• single crystal

Using the laser post-ionization surface analysis technique, I have for the first time studied angular distributions of Ni and Al atoms sputtered from NiAl {1 1 0}. Emission angular distributions from Ni {1 0 0} have also been measured. I have observed preferential emissions of Ni and Al atoms along < 1 1 1 > and < 1 0 0 > crystallographic directions for NiAl {1 1 0} and of Ni atoms along < 1 1 0 > and < 1 0 0 > directions for Ni {1 0 0}. The observed preferential ejections can be explained in terms of the theory of focusing-collision sequences. Because of the difference in surface binding energy between Al and Ni atoms, preferential ejection angles of Ni atoms are slightly different from those of Al atoms along the < 1 1 1 > ejections. For NiAl, the < 1 1 1 > preferential ejections were less prominent than the < 1 0 0 > preferential ejections and this can be related to the low efficiency of momentum transfer in Ni-Al collision sequences along < 1 1 1 > lattice directions. The low efficiency of momentum transfer due to the mass mismatch can also be responsible for the experimental observation that the preferential ejections in the alloy were less prominent than those in the Ni metal.

• 出版日期2007-9-15
• 单位华中师范大学