A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques

作者：Kuang Cuifang^*; Hong En; Ni Jun

来源：Review of Scientific Instruments, 2007, 78(9): 095105.

DOI：10.1063/1.2786272

A novel sensitivity improving method for simultaneously measuring five-degree-of-freedom errors of a moving linear stage is proposed based on collimator and interferometry techniques. The measuring principle and parameters of the system are analyzed theoretically. The experimental results proved that the resolution of the linear displacement of the proposed method has twice that of the current linear interferometer, and the resolutions of the two-dimensional straightness error measurement can be improved by a factor of 8 compared with the movement of the retroreflector itself by using multireflection and lens magnification. The resolutions of the pitch and yaw angular error measurement have been improved by a factor of 10 compared with the rotation of the plane mirror itself by using expander lenses. The whole measuring system is characterized of simple structure, small volume, and high precision. The moving component of the measurement system is wireless, which eliminates the errors and inconvenience introduced by the wire connection. Calibration and comparison tests of this system compared with Renishaw laser interferometer system have been carried out. Experimental results show good consistency for measuring a linear guide way.

• 出版日期2007-9
• 单位北京理工大学