A Scalable Fabrication Process for Liquid Crystal-Based Uncooled Thermal Imagers

作者：Berry Shaun^*; Bozler Carl O; Reich Robert K; Clark Harry R; Bos Phillip; Finnemeyer Valerie; McGinty Colin

来源：Journal of Microelectromechanical Systems, 2016, 25(3): 479-488.

DOI：10.1109/JMEMS.2016.2555246

• Alignment layer
• birefringence
• liquid crystals
• long-wavelength infrared
• microbolometers
• thermal imagers

A novel sensor is being developed for a new uncooled imager technology that is scalable to large formats (tens of megapixels), which is greater than what is achieved by commercial microbolometer arrays. In this novel sensor, a liquid-crystal transducer is used to change a long-wavelength infrared scene into a visible image that can be detected using a conventional visible imager. This approach has the potential for making a more flexible thermal sensor that can be optimized for a variety of applications. In this paper, we describe the microfabrication processes required to create an array of sealed thermally isolated micro-cavities filled with liquid crystals to be used for an uncooled thermal imager. Experimental results from the fabricated arrays will also be discussed.

• 出版日期2016-6
• 单位MIT