Antireflective grassy surface on glass substrates with self-masked dry etching

作者：Song Young Min; Park Gyeong Cheol; Kang Eun Kyu; Yeo Chan Il; Lee Yong Tak^*

来源：Nanoscale Research Letters, 2013, 8(1): 505.

DOI：10.1186/1556-276X-8-505

• Antireflection
• Glass
• Subwavelength structure
• Self-masked dry etching
• Hydrophilicity

Although recently developed bio-inspired nanostructures exhibit superior optic performance, their practical applications are limited due to cost issues. We present highly transparent glasses with grassy surface fabricated with self-masked dry etch process. Simultaneously generated nanoclusters during reactive ion etch process with simple gas mixture (i.e., CF4/O-2) enables lithography-free, one-step nanostructure fabrication. The resulting grassy surfaces, composed of tapered subwavelength structures, exhibit antireflective (AR) properties in 300 to 1,800-nm wavelength ranges as well as improved hydrophilicity for antifogging. Rigorous coupled-wave analysis calculation provides design guidelines for AR surface on glass substrates.

• 出版日期2013-12-1