A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

作者：He Chunhua^*; Zhao Qiancheng; Huang Qinwen; Liu Dachuan; Yang Zhenchuan; Zhang Dacheng; Yan Guizhen

来源：IEEE Sensors Journal, 2015, 15(4): 2069-2077.

DOI：10.1109/JSEN.2014.2371456

• MEMS gyroscope
• mode-matching
• fuzzy control
• neural network control
• robust control
• reliability

This paper presents a method to accomplish automatic and real-time mode-matching control for a microelectromechanical systems vibratory gyroscope based on improved fuzzy algorithm and neural network algorithm. Meanwhile, robust control for the sense mode is applied to enhance the reliability of the closed-loop system. Experimental results demonstrate that it only needs similar to 8 s to achieve mode-matching intelligently in the improved fuzzy control system. In addition, a mismatching error <0.32 Hz is achieved over the temperature range from -40 degrees C to 80 degrees C in the neural network real-time control system, which is improved by more than one order of magnitude compared with that of once-time control system. In addition, the temperature coefficient of the zero bias is also improved to be 0.5 degrees/h/degrees C in the real-time mode-matching control system. Experimental results of phase margin, gain margin, and sensitivity margin indicate that the closed-loop system is stable and robust enough over the full temperature range. Moreover, the bandwidth and bias instability of the mode-matching gyroscope with closed-loop controlled sense mode are >85 Hz and <5 degrees/h, respectively.

• 出版日期2015-4
• 单位北京大学