Direct patterning of Cu microstructures using femtosecond laser-induced CuO nanoparticle reduction

作者：Arakane Shun^*; Mizoshiri Mizue; Hata Seiichi

来源：Japanese Journal of Applied Physics, 2015, 54(6): 06FP07.

DOI：10.7567/JJAP.54.06FP07

Cu-based microstructures were directly patterned using femtosecond laser-induced CuO nanoparticle reduction. CuO nanoparticle-based solution, consisting CuO nanoparticles, ethylene glycol, and polyvinylpyrrolidone, was spin-coated on glass substrates. Microstructures were formed by irradiating focused femtosecond laser pulses. Cu and Cu2O peak intensities were observed in the X-ray diffraction (XRD) spectra of the microstructures. Compared to single scan, the Cu peak intensities increased by double scan. This result suggests that double scan is effective for increasing the amount of Cu from CuO nanoparticle solution. Cu- and Cu2O-rich microstructures were formed selectively by controlling laser irradiation conditions. The resistivity of the Cu-rich microstructures was estimated by 528 mu Omega m which was 10(4) times and 10 times larger than the values of Cu and Cu2O, respectively. This large resistivity could be applied for microheaters.

• 出版日期2015-6