Doubled temperature measurement range for a single micro-ring sensor

作者：Li Xin; Wang Lu-Na; Guo Shi-Liang; Li Zhi-Quan; Yang Ming^*

来源：Acta Physica Sinica, 2014, 63(15): 154209.

DOI：10.7498/aps.63.154209

• micro-ring resonator
• temperature sensor
• measurement of sensor

A novel SOI (silicon on insulator) temperature sensor based on a U-shaped waveguide-coupled single micro-ring is proposed in this paper. Refractive index and length of the temperature-sensing part will change as the temperature changes, leading to the shift of the output spectrum of the sensor. The transfer function of the U-shaped waveguide coupled with a single micro-ring is obtained based on the theory of coupling modes and transfer matrix method. And we have studied the output spectrum properties of the system from different temperature-sensing parts. Results show that the whole structure of U-shaped waveguide coupled with the single micro-ring proves to be the best temperature-sensing part as the output spectrum with no spurious modes and a deep extinction ratio of 31 dB. Compared with the traditional two waveguides coupled with a single micro-ring resonator, when the distance between the two coupling points of the U-shaped waveguide is an integer multiple of circumference of the micro-ring, the free spectrum range (FSR) can be expanded to 56 nm, the sensitivity can achieve 89.2 pm/degrees C, and the measurement range be 298-720 K, achieving a high temperature measurement of SOI micro-ring resonator.

• 出版日期2014-8
• 单位中国科学院电工研究所; 燕山大学; 哈尔滨工业大学