A scanning tunneling microscope with a scanning range from hundreds of micrometers down to nanometer resolution

作者:Kalkan Fatih*; Zaum Christopher; Morgenstern Karina
来源:Review of Scientific Instruments, 2012, 83(10): 103903.
DOI:10.1063/1.4744931

摘要

A beetle type stage and a flexure scanning stage are combined to form a two stages scanning tunneling microscope (STM). It operates at room temperature in ultrahigh vacuum and is capable of scanning areas up to 300 mu m x 450 mu m down to resolution on the nanometer scale. This multi-scale STM has been designed and constructed in order to investigate prestructured metallic or semiconducting micro-and nano-structures in real space from atomic-sized structures up to the large-scale environment. The principle of the instrument is demonstrated on two different systems. Gallium nitride based micropillars demonstrate scan areas up to hundreds of micrometers; a Au(111) surface demonstrates nanometer resolution.

  • 出版日期2012-10