科研之友
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摘要
A biosensor with mirror microcantilevers, based on silicon-on-insulator (SOI) was designed and fabricated for biochemical detection. For measuring the extremely low deflections of the microcantilevers, a high precision optical readout approach based on a fiber optical reflective light intensity readout approach were presented. The results demonstrate that microcantilever biosensor has very high sensitivity of 6.26908 mV/nm, and the measurement resolution is up to 0.1998 nm. In the practical measure glucose solution concentration experiments, the results demonstrate that the sensitivity is up to 1.19 mV/mu g/ml.
