Diamond tool wear measurement by electron-beam-induced deposition

作者：Shi M^*; Lane B; Mooney C B; Dow T A; Scattergood R O

来源：Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, 2010, 34(4): 718-721.

DOI：10.1016/j.precisioneng.2010.03.009

• Diamond turning
• Diamond tool wear
• EBID
• Edge radius
• Wear land

Quantitative characterization of a diamond tool profile is critical to reveal tool wear mechanisms. An electron-beam-induced deposition (EBID) method reported previously is further developed and improved to measure diamond tool profiles using a field emission scanning electron microscope (SEM). The edge radius and wear land length for new and worn diamond tools were derived from analysis of the EBID-SEM images. Experimental results are presented to show that the methodology is an effective means to characterize diamond tool wear.

• 出版日期2010-10