科研之友
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摘要
We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of less than 50 mu m has been achieved. Our simple, low-cost system can be a valuable platform in the undergraduate laboratory, providing students with experience in microscopic imaging techniques.
- 出版日期2015-2
