Nanostructure Fabricated by Nanosphere Lithography Assisted with O-2 Plasma Treatment

作者：Yan Wei Guo; Kong Xiang Tian; Li Zu Bin^*; Tian Jian Guo

来源：Journal of Nanoscience and Nanotechnology, 2013, 13(6): 4311-4315.

DOI：10.1166/jnn.2013.7204

• Nanosphere Lithography
• Metal Nanostructures
• O-2 Plasma Treatment
• Self-Assemble

Nanosphere lithography is an efficient way to fabricate metallic nanostructures with large area. This paper presents the fabrication of metallic hexagonal nano-pyramid arrays by two dimensional nanospheres lithography assisted with O-2 plasma treatment. By O-2 plasma treatment, the gap and diameter of nanospheres can be modulated. After electron beam deposition, we can fabricate similar nanostructures with different pyramid gap distances. This method may be an easy way to modulate the geometric parameters of nanostructures.

• 出版日期2013-6
• 单位南开大学