摘要

Nanotextured surfaces can effectively reduce friction and adhesion, especially in applications with micro-and nanoscale contact interactions. However, for these surfaces, a common weakness is a lack of structural integrity of the individual nanotextures when subjected to contact loading, resulting in permanent deformation at even the moderate contact forces encountered in microscale systems. Nanostructure-textured surfaces (NSTSs), composed of arrays of novel Al/a-Si core-shell nanostructures (CSNs), have been developed with a desirable combination of low friction and high deformation resistance. When subjected to nanoscratch testing, these surfaces are shown to have extremely low coefficients of friction (as low as similar to 0.015), as well as no detectable nanostructure deformation at contact forces up to 8,000 mu N (estimated contact pressure greater than 1 GPa). In addition, the NSTSs have low adhesion (pull-off) forces on the order of less than 1 mu N. The unique properties of these NSTSs provide avenues for designing low-friction, deformation-resistant surfaces that could benefit a variety of fields, including micro/nanoelectromechanical systems (MEMS/NEMS), microelectronics, magnetic recording, or any other application where the mechanical integrity of nanostructures is important.

  • 出版日期2018