Mechanical and tribological properties evaluation of cathodic arc deposited CrN/ZrN multilayer coatings

作者：Huang Sung Hsiu; Chen Siao Fan; Kuo Yu Chu; Wang Chaur Jeng; Lee Jyh Wei^*; Chan Yu Chen; Chen Hsien Wei; Duh Jenq Gong; Hsieh Tsung Eong

来源：Surface and Coatings Technology, 2011, 206(7): 1744-1752.

DOI：10.1016/j.surfcoat.2011.10.029

• Nanostructured multilayer coatings
• Cathode arc evaporation
• Bilayer period
• CrN/ZrN

Five nanostructured CrN/ZrN multilayer coatings were deposited periodically by cathodic arc evaporation. The bilayer periods of the CrN/ZrN multilayer coatings were controlled in the range of 5 to 30 nm. The structures and bilayer period of the multilayer coatings were characterized by an X-ray diffractometer. The microstructures of thin films were examined by scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively. Nanoindentation, scratch tests, Daimler-Benz Rockwell-C (HRC-DB) adhesion tests, microhardness and pin-on-disk wear tests were used to evaluate the hardness, adhesion, indentation toughness and tribological properties of thin films, respectively. It was found that the hardness and tribological properties were strongly influenced by the bilayer period of the CrN/ZrN multilayer coatings. An optimal combination of mechanical properties and excellent tribological behavior was found for a coating with a critical bilayer period of 30 nm.

• 出版日期2011-12-25
• 单位清华大学