Deposition of YBCO films on both sides of substrate by magnetron sputtering

作者：Vostokov N V^*; Drozdov Yu N; Masterov D V; Pavlov S A; Parafin A E

来源：Technical Physics Letters, 2010, 36(9): 859-861.

DOI：10.1134/S1063785010090245

We have studied features of the formation of YBa(2)Cu(3)O(7 - delta) (YBCO) films on both sides of sub-strates by magnetron sputtering in the on-axis geometry. During sputter deposition onto the first (front) side, a thin film is simultaneously formed on the second (rear) side, which can provide a high-quality sublayer for the final coating of preset thickness deposited at the subsequent stage. It is shown that, by monitoring the properties of a sublayer formed on the rear side of substrate during YBCO layer growth on the front side, it is possible to optimize technological parameters of the process.

• 出版日期2010-9