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摘要
In this work, molecular dynamics simulation is employed to represent the diamond polishing. Radial distribution function and coordination number analyses are further performed to reveal the underlying atomistic origins of the removal rate anisotropy. The results show that the lattice distortion is inevitable as the diamond substrate suffers from the mechanically induced effects, which produces an amorphous layer on the surface. In the amorphization, the perfect diamond cubic transforms to some non-diamond phases, including the amorphous sp(0), sp(1), sp(2) and sp(3) hybridized structures and well-arranged sp(2) structures. However, the dominant phases are sp(2) and amorphous sp(3) phases. More interestingly, it is found that the removal rate strongly depends on the proportion of sp(2) hybridizations to amorphous sp(3) structures. In the 'hard' direction, phase transformation from amorphous sp(3) to sp(2) is difficult, and therefore a low proportion of sp(2) to amorphous sp(3) appears, which results in a small removal rate. In the soft' direction, phase transformation from amorphous sp(3) to sp(2) has less resistance, and a higher proportion output, which gives a greater removal rate. The variation laws as revealed above confirm that the removal rate anisotropy in diamond polishing is derived from the concentration of sp(2) hybridizations in the as-created amorphous layer and debris.
- 出版日期2016-4
- 单位哈尔滨工业大学
