Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

作者：Yu Xiangzhi^*; Gillmer Steven R; Woody Shane C; Ellis Jonathan D

来源：Review of Scientific Instruments, 2016, 87(6): 065109.

DOI：10.1063/1.4953335

A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 mu m in straightness, 0.14 mu rad in pitch, 0.44 mu rad in yaw, and 45.8 mu rad in roll. Published by AIP Publishing.

• 出版日期2016-6