A Highly Thermostable In2O3/ITO Thin Film Thermocouple Prepared via Screen Printing for High Temperature Measurements

作者:Liu, Yantao; Ren, Wei*; Shi, Peng*; Liu, Dan; Zhang, Yijun; Liu, Ming; Ye, Zuo-Guang; Jing, Weixuan; Tian, Bian; Jiang, Zhuangde
来源:Sensors (Switzerland), 2018, 18(4): 958.
DOI:10.3390/s18040958

摘要

An In2O3/ITO thin film thermocouple was prepared via screen printing. Glass additives were added to improve the sintering process and to increase the density of the In2O3/ITO films. The surface and cross-sectional images indicate that both the grain size and densification of the ITO and In2O3 films increased with the increase in annealing time. The thermoelectric voltage of the In2O3/ITO thermocouple was 53.5 mV at 1270 degrees C at the hot junction. The average Seebeck coefficient of the thermocouple was calculated as 44.5 mu V/degrees C. The drift rate of the In2O3/ITO thermocouple was 5.44 degrees C/h at a measuring time of 10 h at 1270 degrees C.