A current driven capacitively coupled chlorine discharge

作者：Huang, Shuo^*; Gudmundsson, J T

来源：Plasma Sources Science and Technology, 2014, 23(2): 025015.

DOI：10.1088/0963-0252/23/2/025015

• capacitively coupled discharge
• chlorine
• particle-in-cell/Monte Carlo

The effect of driving current, driving frequency and secondary electrons on capacitively coupled chlorine discharge is systematically investigated using a hybrid approach consisting of a particle-in-cell/Monte Carlo simulation and a volume-averaged global model. The driving current is varied from 20 to 80Am(-2), the driving frequency is varied from 13.56 to 60MHz and the secondary electron emission coefficient is varied from 0.0 to 0.4. Key plasma parameters including electron energy probability function, electron heating rate, ion energy and angular distributions are explored and their variations with control parameters are analyzed and compared with other discharges. Furthermore, we extend our study to dual-frequency (DF) capacitively coupled chlorine discharge by adding a low-frequency current source and explore the effect of the low-frequency source on the discharge. The low-frequency current density is increased from 0 to 4Am(-2). The flux of Cl-2( ) ions to the surface increases only slightly while the average energy of Cl-2( ) ions to the surface increases almost linearly with increasing low-frequency current, which shows possible independent control of the flux and energy of Cl-2( ) ions by varying the low-frequency current in a DF capacitively coupled chlorine discharge. However, the increase in the flux of Cl ions with increasing low-frequency current, which is mainly due to the increased dissociation fraction of the background gas caused by extra power supplied by the low-frequency source, is undesirable.

• 出版日期2014-4
• 单位上海交通大学