科研之友
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摘要
Simulation of the microphone membrane determines whether highest sensitivity is attainable when it comes to the field of microelectromechanical system (MEMS) microphone design. The reproducing kernel particle method is introduced to simulate a MEMS microphone membrane in viscothermal fluid. The result from a numerical axisymmetry model of 1mm radius and 10 lm thickness membrane with a fixed boundary condition upon 1mm thickness viscothermal air is identical to that from the theoretical model. Finally, a MEMS axisymmetry model of a 180 lm radius and 10 lm thickness membrane upon 10 lm thickness viscothermal air is simulated here.
- 出版日期2013
