Epitaxial Graphene Nanoribbon Array Fabrication Using BCP-Assisted Nanolithography

作者：Liu Guanxiong; Wu Yanqing; Lin Yu Ming; Farmer Damon B; Ott John A; Bruley John; Grill Alfred; Avouris Phaedon; Pfeiffer Dirk; Balandin Alexander A; Dimitrakopoulos Christos^*

来源：ACS Nano, 2012, 6(8): 6786-6792.

DOI：10.1021/nn301515a

• epitaxial graphene
• SiC
• nanoribbon
• nanolithography
• block copolymer

A process for fabricating dense graphene nanoribbon arrays using self-assembled patterns of block copolymers on graphene grown epitaxially on SiC on the wafer scale has been developed. Etching masks comprising long and straight nanoribbon array structures with linewidths as narrow as 10 nm were fabricated, and the patterns were transferred to graphene. Our process combines both top-down and self-assembly steps to fabricate long graphene nanoribbon arrays with low defect counts. These are the narrowest nanoribbon arrays of epitaxial graphene on SiC fabricated to date.

• 出版日期2012-8
• 单位IBM