Alpha-Particle Induced Soft-Error Rate in CMOS 130 nm SRAM

作者：Martinie S^*; Autran J L; Uznanski S; Roche P; Gasiot G; Munteanu D; Sauze S

来源：IEEE Transactions on Nuclear Science, 2011, 58(3): 1086-1092.

DOI：10.1109/TNS.2010.2102363

• Alpha emitter
• contamination
• real-time testing
• secular equilibrium
• single-event rate (SER)
• static memory
• uranium
• uranium disintegration chain

We report the modeling and simulation of the soft-error rate (SER) in CMOS 130 nm SRAM induced by alpha-particle emission in silicon due to uranium contamination at ppb concentration levels. Monte-Carlo simulation results have been confronted to experimental data obtained from long-duration (>20 000 h) real-time measurements performed at the under-ground laboratory of Modane (LSM) and from experimental counting characterization using an ultra low background alpha-particle gas proportional counter. The calibration of simulations with the measured SER allowed us to determine a U-238 contamination level of 0.37 ppb (considered at secular equilibrium) in very good agreement with both corresponding alpha-particle emissivity levels measured and simulated at wafer-level in the range 1.1 to 2.3 x 10(-3) alpha/cm(2)/h.

• 出版日期2011-6