A novel negative photoinitiator-free photosensitive polyimide

作者：Jiang, Xuesong; Li, Hao; Wang, Hongyu; Shi, Zixing; Yin, Jie^*

来源：Polymer, 2006, 47(9): 2942-2945.

DOI：10.1016/j.polymer.2006.03.022

• photoinitiator-free
• photosensitive
• polyimide

A novel negative photoinitiator-free photosensitive polyimide (PFPS-PI) was synthesized through introducing the photosensitive 4,4-bis[(4-amino)thiophenyl] benzophenone (BATPB) into backbone chain and methyl acrylate group into side-chain of the polyimide, respectively. Photosensitive properties study revealed its good photolithographic properties, with a resolution about 5 put, and a sensitivity of 150 mJ/cm(2).

• 出版日期2006-4-19
• 单位上海交通大学