科研之友
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摘要
This paper presents design method and fabrication process of novel devices which were used in the microelectromechanical systems based ultrasonic ranging system. An acoustical transducer microarray operating in d31 mode which can offer strong directionality with a high radiation acoustic power has been developed to enhance the spatial resolution in the pulse-echo measurement in air while an acoustical transducer operating in d33 mode which has a high isotropic receive sensitivity has been designed to expand the system detection range. The proposed devices based on novel ferroelectric thin film has excellent performance, miniature size and high reliability, and could be fabricated with conventional integrated circuit process.
- 出版日期2009
- 单位清华大学
