Direct and alignment-insensitive measurement of cantilever curvature

作者：Hermans Rodolfo I^*; Bailey Joe M; Aeppli Gabriel

来源：Applied Physics Letters, 2013, 103(3): 034103.

DOI：10.1063/1.4813265

We analytically derive and experimentally demonstrate a method for the simultaneous measurement of deflection for large arrays of cantilevers. The Fresnel diffraction patterns of a cantilever independently reveal tilt, curvature, cubic, and higher order bending of the cantilever. It provides a calibrated absolute measurement of the polynomial coefficients describing the cantilever shape, without careful alignment and could be applied to several cantilevers simultaneously with no added complexity. We show that the method is easily implemented, works in both liquid media and in air, for a broad range of displacements and is especially suited to the requirements for multi-marker biosensors.

• 出版日期2013-7-15