Nanoscale Probing of Thermal, Stress, and Optical Fields under Near-Field Laser Heating

作者：Tang, Xiaoduan; Xu, Shen; Wang, Xinwei^*

来源：PLos One, 2013, 8(3): e58030.

DOI：10.1371/journal.pone.0058030

• HEMISPHERICAL CAVITY ARRAYS
• RAMAN-SPECTROSCOPY
• MICROSCOPY
• RESOLUTION
• SILICON
• FABRICATION
• SUPERLENS
• LITHOGRAPHY
• ENHANCEMENT
• PARTICLES

Micro/nanoparticle induced near-field laser ultra-focusing and heating has been widely used in laser-assisted nanopatterning and nanolithography to pattern nanoscale features on a large-area substrate. Knowledge of the temperature and stress in the nanoscale near-field heating region is critical for process control and optimization. At present, probing of the nanoscale temperature, stress, and optical fields remains a great challenge since the heating area is very small (similar to 100 nm or less) and not immediately accessible for sensing. In this work, we report the first experimental study on nanoscale mapping of particle-induced thermal, stress, and optical fields by using a single laser for both near-field excitation and Raman probing. The mapping results based on Raman intensity variation, wavenumber shift, and linewidth broadening all give consistent conjugated thermal, stress, and near-field focusing effects at a 20 nm resolution (<lambda/26, lambda = 32 nm). Nanoscale mapping of near-field effects of particles from 1210 down to 160 nm demonstrates the strong capacity of such a technique. By developing a new strategy for physical analysis, we have de-conjugated the effects of temperature, stress, and near-field focusing from the Raman mapping. The temperature rise and stress in the nanoscale heating region is evaluated at different energy levels. High-fidelity electromagnetic and temperature field simulation is conducted to accurately interpret the experimental results.

• 出版日期2013-3-28
• 单位青岛理工大学