Multi-wavelength phase-shifting interferometry for micro-structures measurement based on color image processing in white light interference

作者：Guo, Tong^*; Li, Feng; Chen, Jinping; Fu, Xing; Hu, Xiaotang

来源：Optics and Lasers in Engineering, 2016, 82: 41-47.

DOI：10.1016/j.optlaseng.2016.02.003

• White light interference
• Multi-wavelength
• Color image
• Phase-shifting algorithm

Conventional multi-wavelength phase-shifting interferometry utilizes two or three monochromatic light sources, such as lasers, to realize the measurement of the surface topography with large discontinuity. In this paper, the white light source, with a single-chip CCD color camera, is used to accomplish multi wavelength phase-shifting interferometry. In addition, we propose an algorithm which combines white light phase-shifting algorithm, equivalent wavelength method and fringe order method to achieve measuring and calibrating the micro-structures ranging from nanometer scale to micrometer scale. Finally, the proposed method is validated by a traceable step height standard.

• 出版日期2016-7
• 单位天津大学