Atomic-layer deposition of thin titanium dioxide films from tetramethoxytitanium and water

作者:Alekhin A P*; Markeev A M; Ovchinnikov D V; Solov'ev A A; Toknova V F
来源:Russian Journal of Applied Chemistry, 2013, 86(6): 817-823.
DOI:10.1134/S1070427213060050

摘要

Comparative analysis of atomic-layer deposition of titanium dioxide in precursor systems Ti(OCH3)(4)-H2O and Ti(OC2H5)(4)-H2O demonstrated that the growth rate of titanium dioxide produced by atomic-layer deposition in the Ti(OCH3)(4)-H2O system can be adequately estimated using a model taking into account the number and size of ligands in the metal-containing precursor. Studies in simulated body fluids demonstrated that polycrystalline anatase TiO2 coatings are capable of accelerated osteointegration, which makes this precursor promising for development of new biomedical articles.

  • 出版日期2013-6

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