A Temperature Compensation Concept for a Micromachined Film Bulk Acoustic Resonator Oscillator

作者：Zhang Xu^*; Xu Wencheng; Chae Junseok

来源：IEEE Sensors Journal, 2015, 15(9): 5272-5277.

DOI：10.1109/JSEN.2015.2438323

• Piezoelectric transducers
• temperature compensation
• frequency tuning
• FBAR
• FBAR oscillator

We present a temperature compensation technique of a film bulk acoustic resonator (FBAR)-based oscillator by tuning the supply voltage of the oscillator. The FBAR-based oscillator uses a high-Q FBAR that is made of a thin ZnO piezoelectric film sandwiched by two electrodes. The FBAR is significantly sensitive to temperature change, consequently resulting in large temperature sensitivity of the FBAR-based oscillator. In this paper, we present a temperature compensation technique that improves the temperature coefficient (TCfosc) of a 1.625-GHz FBAR-based oscillator from -118 ppm/K to less than 1 ppm/K by tuning the supply voltage of the oscillator. The tuning technique has a large frequency tunability of -4305 ppm/V.

• 出版日期2015-9