An atomic-level study of material ablation and spallation in ultrafast laser processing of gold films

作者：Gan Yong^*; Chen J K

来源：Journal of Applied Physics, 2010, 108(10): 103102.

DOI：10.1063/1.3504192

Ablation and spallation of gold thin films by an ultrashort laser pulse are simulated by using an integrated two-temperature model and molecular dynamics method with inclusion of the hot electron blast force. The simulation results show that the ultrafast laser-induced nonthermal ablation and spallation both are essentially due to dynamic tensile stress that exceeds the local material strength. It is also demonstrated that a simultaneous use of femtosecond and picosecond laser pulses could induce spallation without causing undesired front-side damage to the film. This may be suited to peel an ultrathin film (1 mu m in thickness or less) from its substrate or to improve the material removal rate of precise laser processing.

• 出版日期2010-11-15
• 单位浙江大学