Asynchronous bundling of linear ultrasonic motor for precision positioning stage

作者：Wang Jin Peng^*; Jin Jia Mei; Zhao Chun Sheng

来源：Optics and Precision Engineering, 2011, 19(11): 2693-2702.

DOI：10.3788/OPE.20111911.2693

• Asynchronous bundle
• Contact frequency
• Displacement resolution
• Driving frequencies
• Linear ultrasonic motor
• Maximum Efficiency
• Maximum load
• Mechanical characteristics
• Mutual interference
• Output force
• Output performance
• Positioning stage
• Precision positioning stage
• Resolution tests
• Transient characteristics
• Transient response characteristics
• Two-motor
• Vibration cycle

A concept of Asynchronous Bundle of Linear Ultrasonic Motor (ABLUSM) was proposed to improve the resolution, thrust and the speed of driving unit for a precision positioning stage. It points out that a numbers of stators (vibrators) alternately drive a mover (rotor) in a vibration cycle, the actual driving frequency is increased doubly, and better output performance can be expected. An analysis shows that increasing the contact frequency between stator and mover is able to improve the output force, speed and transient response characteristics of a Linear Ultrasonic Motor (LUSM). Meanwhile, it can avoid the mutual interference of different stators in Synchronous Bundling of LUSM (SBLUSM). Experimental results of two types of motors show that the maximum load force of the ABLUSM is 30% upon that of the SBLUSM or 25% over that of the sum of two motors when they drive the slider respectively. Results of minimum resolution test show that the minimum displacement resolution of the ABLUSM is 32.6 nm, which is 62.8% that of a single LUSM or 38.5% that of the SBLUSM. The mechanical characteristic experiments of the LUSM with one driving tip also prove that the no-load speed of ABLUSM has increased by 10% as compared with that both of the single stator and the SBLUSM. Moreover, the maximum efficiency has by 50% over that of the SBLUSM. Transient response time is shorter than SBLUSM, which is about 50% of a single stator.

• 出版日期2011
• 单位南京航空航天大学