A new method of probing mechanical losses of coatings at cryogenic temperatures

Galliou, Serge<sup>*</sup>; Deleglise, Samuel; Goryachev, Maxim; Neuhaus, Leonhard; Cagnoli, Gianpietro; Zerkani, Salim; Dolique, Vincent; Bon, Jeremy; Vacheret, Xavier; Abbe, Philippe; Pinard, Laurent; Michel, Christophe; Karassouloff, Thibaut; Briant, Tristan; Cohadon, Pierre-Francois; Heidmann, Antoine; Tobar, Michael E.; Bourquin, Roger

doi:10.1063/1.4972106

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A new method of probing mechanical losses of coatings at cryogenic temperatures

作者：Galliou, Serge^*; Deleglise, Samuel; Goryachev, Maxim; Neuhaus, Leonhard; Cagnoli, Gianpietro; Zerkani, Salim; Dolique, Vincent; Bon, Jeremy; Vacheret, Xavier; Abbe, Philippe; Pinard, Laurent; Michel, Christophe; Karassouloff, Thibaut; Briant, Tristan; Cohadon, Pierre-Francois; Heidmann, Antoine; Tobar, Michael E.; Bourquin, Roger

来源：Review of Scientific Instruments, 2016, 87(12): 123906.

DOI：10.1063/1.4972106

摘要

A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coating nowadays. The approach is demonstrated for chromium, chromium/ gold, and multilayer tantala/silica coatings. The Ta2O5/SiO2 coating has been found to exhibit a loss angle lower than 1.6 x 10(-5) near 30 MHz at 4 K. The results are compared to the previous measurements. Published by AIP Publishing.