Analysis of hydrogen in materials with and without high hydrogen mobility

作者：Stevie F A^*

来源：Surface and Interface Analysis, 2016, 48(5): 310-314.

DOI：10.1002/sia.5930

• hydrogen analysis
• depth profiling
• SIMS
• hydrogen forward scattering
• nuclear reaction analysis
• niobium analysis

Hydrogen is a very important element but analysis of hydrogen in solids can be difficult and is not available for many analytical techniques. This paper provides an overview of the capabilities of SIMS and NRA to measure hydrogen concentrations and distributions. Bulk analysis methods provide an overall result, but depth profiles are often needed. SIMS can produce useful and quantifiable depth profiles for hydrogen and the isotopes deuterium and tritium. Hydrogen analysis at the surface and imaging with good lateral resolution can also be achieved with SIMS. However, hydrogen can have high mobility in a variety of materials and this will affect SIMS analysis. For those cases, other surface analysis methods such as hydrogen forward scattering and nuclear reaction analysis are preferred. Hydrogen analysis examples in silicon and in niobium are used for materials without and with high hydrogen mobility respectively.

• 出版日期2016-5