科研之友
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摘要
We describe an experimental study on the double-bent leaf flexure-guided nano-scanner introduced in a previous paper [J. Korean Phy. Soc. 57, 1581 (2010)]. The optimally-designed nano-scanner was fabricated. Its performances were verified using a finite element analysis (FEA). The nano-scanner is actuated by a voice coil motor. Its characteristics were measured with a laser interferometer. The first resonant frequency is calculated as 17.1 Hz. The performances of the nano-scanner, including sine tracking capability, a multi-step response, and range of travel check were evaluated using various experimental procedures. Test results reveal that the scanner traveled over a 4.0 mm range and had good nano-precision (4 nm).
- 出版日期2014-11
