An integrated Mach-Zehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

作者：Choo Sung Joong; Kim Jinsik; Lee Kyung Woon; Lee Dong Ho; Shin Hyun Joon; Park Jung Ho^*

来源：Current Applied Physics, 2014, 14(7): 954-959.

DOI：10.1016/j.cap.2014.04.016

• Integrated Mach-Zehnder interferometric biochip
• Silicon oxynitride layers
• Plasma-enhanced chemical vapor deposition
• DNA

We report the design and fabrication of an integrated Mach-Zehnder interferometric (MZI) biochip based on Silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

• 出版日期2014-7