Nanocrystallized Cu2Se grown on electroless Cu coated p-type Si using electrochemical atomic layer deposition

作者:Zhang, Lu; He, Wenya; Chen, Xiang-yu; Du, Yi; Zhang, Xin*; Shen, Yehua; Yang, Fengchun
来源:Surface Science, 2015, 631(Jan.): 173-177.
DOI:10.1016/j.susc.2014.08.014

摘要

Cuprous selenide (Cu2Se) nanocrystalline thin films are grown onto electroless Cu coating on p-Si (100) substrates using electrochemical atomic layer deposition (EC-ALD), which includes alternate electrodeposition of Cu and Se atomic layers. The obtained films were characterized by X-ray diffraction (XRD), field emission scanning electronic microscopy (FE-SEM), FTIR, and open-circuit potential (OCP) studies. The results show the higher quality and good photoelectric properti