摘要

Mn-modified rhombohedral phase yPb(In1/2Nb1/2)O-3-(1-x-y)Pb(Mg1/3Nb2/3)O-3-xPbTiO(3) (PIN-PMN-PT:Mn) single crystal has attracted considerable attention for its outstanding piezoelectric properties and high mechanical quality factor. Here, we report a device innovation using Mn doped 0.27PIN-0.46PMN-0.27PT single crystal in a single-mode piezoelectric ultrasonic motor. Based on the analyses of actuator characteristics with finite element method, the PIN-PMN-PT:Mn crystal actuator predicts lower excitation frequency, lower driving voltage, and less power loss comparing with the PZT ceramic actuator. A prototype motor (size: 12 x 6 x 1.5 mm(3)) was fabricated and tested. The typical output of this PIN-PMN-PT:Mn motor is a speed up to 42.3 cm/s, a driving torque of 0.42 N cm, and an output power density of 0.45 W/cm(3), under the driving voltage of 21 V0-P. This work presents that PIN-PMN-PT:Mn single crystal is quite advantageous in making miniaturized and high-power piezoelectric ultrasonic motors.