Micro-type loading device for in-situ nanoindentation test

作者：Ji Jia Bin; Wang Yi Qiang; Zhao Hong Wei^*; Zhou Xiao Qin; Cao Li; Peng Zhen Xing

来源：Journal of Jilin University (Engineering and Technology Edition), 2010, 40(2): 471-474.

• Diamond indenter
• Displacement signals
• Force signal
• In-situ
• In-situ nanoindentation
• Loading devices

A kind of micro-type precision loading device for in-situ nanoindentation test was proposed. Assisting with the main requirement to nanoindentation test, the mechanism of precision loading device was designed and analyzed, and the scheme to realize nanoindentation test of diamond indenter under the help of hybrid process of piezoelectric stack and flexure hinges was established. The force signal of nanoindentation was measured via flexure hinge based on Hooke';s law. The mechanical analysis and modal study of indentation flexure hinges unit were carried out. Based on those works, the indentation performance, loading force measurement and so on of developed testing platform were tested. The indentation test of single crystal silicon wafer was carried out with the developed prototype. The effective stroke of diamond indenter was 11.96 μm with actuating voltage of 100 V. The platform meets the basic functional requirements of indentation test.

• 出版日期2010