Measurement of the degree of dissociation in inductively coupled nitrogen discharges by using optical emission actinometry and mass spectrometry

作者：Shin Y M^*; Kim E Y; Chung T H

来源：Journal of the Korean Physical Society, 2008, 53(2): 617-623.

• degree of dissociation
• inductively coupled nitrogen plasma
• optical emission actinometry
• mass spectrometry
• electron energy probabilty function

The degree of dissociation is evaluated by using optical emission actinometry and mass spectrometry for inductively coupled nitrogen plasmas with pressures of 1 - 10 mTorr. The degree of dissociation is found to be between 1 % and 3.5 % and gradually increases with pressure and decreases slightly with power. The pressure dependence of the degree of dissociation measured by using optical emission actinometry and mass spectrometry exhibits a similar behavior. A physical explanation of these observations is given with a discussion of the particle balance and plasma properties, such as the electron density, the electron temperature and the electron energy probability function measured by using a Langmuir probe.

• 出版日期2008-8