a-SiOx %26lt; Er %26gt; active photonic crystal resonator membrane fabricated by focused Ga+ ion beam

作者：Figueira David S L^*; Barea Luis A M; Vallini Felipe; Jarschel Paulo F; Lang Rossano; Frateschi Newton C

来源：Optics Express, 2012, 20(17): 18772-18783.

DOI：10.1364/OE.20.018772

We have fabricated thin erbium-doped amorphous silicon suboxide (a-SiOx %26lt; Er %26gt;) photonic crystal membrane using focused gallium ion beam (FIB). The photonic crystal is composed of a hexagonal lattice with a H1 defect supporting two quasi-doubly degenerate second order dipole states. 2-D simulation was used for the design of the structure and full 3-D FDTD (Finite-Difference Time-Domain) numerical simulations were performed for a complete analysis of the structure. The simulation predicted a quality factor for the structure of Q = 350 with a spontaneous emission enhancement of 7. Micro photoluminescence measurements showed an integrated emission intensity enhancement of similar to 2 times with a Q = 130. We show that the discrepancy between simulation and measurement is due to the conical shape of the photonic crystal holes and the optical losses induced by FIB milling.

• 出版日期2012-8-13