科研之友
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摘要
A method for measurement of resistivity of flat samples and thin layers complementary to the well-known van der Pauw technique has been proposed. The method is based on the application of the Thompson-Lampard theorem of electrostatics used in metrology for the realization of calculable capacitor, according to which a large variety of electrode systems can be designed. A prototypic electrode arrangement is shown on which the practical performance of the method was tested.
- 出版日期2012-4
