A routine procedure for the characterisation of polycapillary X-ray semi-lenses in parallelising mode with SEM/EDS

作者：Rackwitz Vanessa^*; Procop Mathias; Bjeoumikhova Semfira; Panne Ulrich; Hodoroaba Vasile Dan

来源：Journal of Analytical Atomic Spectrometry, 2011, 26(3): 499-504.

DOI：10.1039/c0ja00135j

The accurate knowledge of the properties of polycapillary X-ray semi-lenses has a significant influence on the quantitative results in a widespread field of applications involving microfocus X-ray beams. A routine procedure for the characterisation of a polycapillary X-ray semi-lens with a scanning electron microscope (SEM) having attached an energy dispersive spectrometer (EDS) is presented in this paper. A key issue of the procedure consists of fitting the semi-lens in front of the EDS for spectra acquisition. Relevant semi-lens parameters such as focal distance, full width at half maximum (FWHM) of the acceptance area, and transmission are determined in parallelising mode of the semi-lens. Special attention has been paid to the calculation of the transmission.

• 出版日期2011