Analysis and Design of a Polygonal Oblique Beam for the Butterfly Vibratory Gyroscope with Improved Robustness to Fabrication Imperfections

作者：Ou, Fenlan; Hou, Zhanqiang^*; Wu, Xuezhong; Xiao, Dingbang

来源：Micromachines, 2018, 9(5): 198.

DOI：10.3390/mi9050198

• gyroscope
• spindle azimuth angle
• fabrication imperfections
• tolerant capability
• quadrature error

This paper focuses on structural optimization of a Butterfly vibratory gyroscope (BFVG). An oblique suspension beam adopting polygonal cross-section is proposed in order to enhance the sensitivity and robustness. The operation principles of the BFVG are introduced. The suspension beam, which was found to be the key component, is selectively stressed. Varying cross sections of the suspension beam, including parallelogram, pentagon, hexagon, platform of pentagon, L-shaped and convex shapes are compared with each other. In particular, in order to show the advantages of the proposed polygonal cross-section, the convex cross-section is used as a reference. The influence of fabrication imperfections, which includes alignment error, silicon thickness error, etching depth error, upper width error, bottom width error and deep reactive-ion etching (DRIE) verticality error, on the oblique beam's spindle azimuth angle of the two cross-sections is analyzed. Further, the quadrature error of two cross-sections with a fabrication defect is analyzed. The theoretical arithmetic results suggest that a polygonal cross-section beam is much more stable than a convex cross-section beam in most cases. The robustness of the fabrication imperfection is improved nine-fold and the quadrature error due to fabrication defect is reduced by 70 percent with a polygonal cross-section. It could be a better candidate for BFVG's oblique beam, which would provide a gyroscope with good robustness and repeatability.

• 出版日期2018-5
• 单位中国人民解放军国防科学技术大学