Dual-beam actuation of piezoelectric AlN RF MEMS switches monolithically integrated with AlN contour-mode resonators

作者：Mahameed Rashed^*; Sinha Nipun; Pisani Marcelo B; Piazza Gianluca

来源：Journal of Micromechanics and Microengineering, 2008, 18(10): 105011.

DOI：10.1088/0960-1317/18/10/105011

This work reports on piezoelectric aluminum nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires a low actuation voltage (5 to 20 V) and facilitates active pull-off to open the switch and exhibits fast switching times (1 to 2 mu s). This work also presents the combined response (cascaded S parameters) of a resonator and a switch that were co-fabricated on the same substrate. The response shows that the resonator can be effectively turned on and off by the switch. A post-CMOS compatible process was used for the co-fabrication of both the switches and the resonators. The single-chip RF solution presented constitutes an unprecedented step forward towards the realization of compact, low-loss and integrated multi-frequency RF front-ends.

• 出版日期2008-10