Application of Carbon Nanotubes (CNT) to Photosensitive Diazo/PVA Resist (3) - Effect of CNT Length

作者：Hanzawa Yohko^*; Nakada Masahiro; Harada Kieko; Okada Masaki; Hiaki Toshihiko; Matsuda Kiyomi; Hamana Hiroshi; Takahara Shigeru; Sugita Kazuyuki

来源：Journal of Photopolymer Science and Technology, 2011, 24(4): 379-382.

DOI：10.2494/photopolymer.24.379

• photosensitive diazo compound
• multi-walled nanotube (CNT)
• photodecomposition

Degradation temperature, D.T. of the para-substituted benzene diazo compound (SBD) mixed with various length of multi-walled carbon nanotubes (CNT) : 3-20, 20-40, 40-70 nm, was determined by TDA and DTA in solid. Temperature rise ratio of D.T. of SBD with electron-withdrawing substitutent (WSB) was larger than that of SBD with electron-donating substituent (DSB). It is considered that a cationic diazo group of SBD is easily coordinated by electron-rich CNT surface. The D.T. of SBD with long CNT was higher than that with short CNT. Stabilization energies of diazo compounds with CNT were calculated by WinMOPAC, to be about 37 kJ/mol per diazo molecule. Oxidation treatment of CNT led to better dispersion of CNT particles. Photodecomposition rate of Diazo/PVA resist film with CNT was increased, but effect of CNT length on the photodecomposition was not observed. Shorter ox-CNT in length showed higher transmittance. Hardness of the film with long CNT was larger than that with short CNT. It is considered that degree of packing of the polymer chain with long CNT is higher than that with short CNT.

• 出版日期2011