Fabrication of self-ruled micro grating on CR-39 using ArF laser-induced rippling

作者：Refahizadeh M; Parvin P^*; Silakhori K; Mortazavi S Z; Mehdilo A

来源：Laser Physics, 2017, 27(6): 066101.

DOI：10.1088/1555-6611/aa6be1

• CR-39 polymer
• micro grating
• microstructures
• self-lining
• ArF laser

The excimer laser at 193 nm induces regular self-assembled microstructures on poly allyl diglycol carbonate PADC (or CR-39). This surface rippling is threshold-dependent and undergoes different features at low/high UV fluences. The microstructures are characterized by small/large aspect ratios (0.056-0.226) at low/high UV fluences of 40-1000 mJ cm(-2). The self-aligning micro grooves show a strong sensitivity to the incident angles. As a consequence, the parameter of the fluence threshold drastically reduces in terms of the large incident angles, leading to parallelism over a broad treated area. In fact, the self-rippling at high UV fluences aligns with P-polarization of the incident beam. Conversely, the pattern appears in the orientation of the S-polarization under low fluences. This unique property of CR-39 is used to fabricate the micro gratings of 250-2900 lines mm(-1), which certainly meets the criteria for high efficiency at small aspect ratios.

• 出版日期2017-6