A photonic crystal ring resonator formed by SOI nano-rods

作者:Chiu Wei Yu*; Huang Tai Wei; Wu Yen Hsiang; Chan Yi Jen; Hou Chia Hung; Chien Hung Ta; Chen Chii Chang
来源:Optics Express, 2007, 15(23): 15500-15506.
DOI:10.1364/OE.15.015500

摘要

The design, fabrication and measurement of a silicon- on- insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55 mu m. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31 mu m/ 1.55 mu m wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.