Assessment method of numerical integration used in measuring profile based on ultra-precise thin light beam scanning

作者：Lang Zhi Guo^*; Tan Jiu Bin

来源：Optoelectronics Letters, 2009, 5(6): 476-480.

DOI：10.1007/s11801-009-8148-1

• Assessment methods
• Cubic spline
• Different frequency
• Frequency domains
• Light beam scanning
• Numerical integration methods
• Numerical integrations
• Numerical-integration algorithms
• Profile measurement
• Recursive digital filters
• Simpson
• Simpson rules

In order to improve the precision of profile measurement based on ultra-precise thin light beam scanning, an assessment method that compares different numerical integration algorithms in frequency-domain is put forward. The compared numerical integration methods are regarded as recursive digital filters. Through comparing their functions of frequency response in frequency-domain, the delivering role of noise with different frequencies can be analyzed directly and clearly in the process of integrating measured slope data. Analyzing results show that the method of cubic spline is better than trapezoidal, Simpson and 3/8 Simpson rules. ? 2009 Tianjin University of Technology and Springer Berlin Heidelberg.

• 出版日期2009